| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a package capable of preventing a foreign substance such as dust from adhering to a pellicle stored in a pellicle-storing case during transportation of the pellicle. <P>SOLUTION: In the package of the pellicle-storing case containing a packing box and a cushioning material protecting the pellicle-storing case stored in the packing box in the packing box, the cushioning material has an extensible and contractible support film supporting the upper surface or the bottom surface of the pellicle-storing case and the frame body which is approximately polygonal in a plan view and over which the support film is spread, and the support film is substantially fixed to and spread over the positions with the central part of one side placed between on at least one side of the frame body. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
