发明名称 |
SCANNER DEVICE FOR SCANNING PROBE MICROSCOPE |
摘要 |
A scanner device is provided which enables high-frequency scanning and can increase the speed of a scanning probe microscope. A scanner device (1) used for a scanning probe microscope includes a Z actuator (7) which scans an object to be scanned in a scanning direction, and a Z actuator holder (11) which holds the Z actuator (7). The Z actuator holder (11) holds the Z actuator (7) at a plurality of holding line parts which extend in the scanning direction and are separated from each other. For example, the Z actuator (7) has a rectangular cross-section, and the four edges of the Z actuator (7) are held by the Z actuator holder (11). The Z actuator (7) is pressed into a holding hole (29) of the Z actuator holder (11).
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申请公布号 |
US2011093989(A1) |
申请公布日期 |
2011.04.21 |
申请号 |
US20090995875 |
申请日期 |
2009.05.29 |
申请人 |
FUKUMA TAKESHI;ANDO TOSHIO;OKAZAKI YASUTAKA |
发明人 |
FUKUMA TAKESHI;ANDO TOSHIO;OKAZAKI YASUTAKA |
分类号 |
G01Q10/00;G01Q10/04;G01Q70/00 |
主分类号 |
G01Q10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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