发明名称 |
POSITIVE PHOTORESIST COMPOSITION |
摘要 |
PURPOSE: A positive photo-resist composition is provided to improve operational environment and be used for a real industrial field by reducing the generation amount of bad odors. CONSTITUTION: A positive photo-resist composition includes a novolak resin, a diazide-based photosensitive compound, and a mixing solvent. 40 to 80 weight% of propylene glycol monomethyl ether acetate, 10 to 40 weight% of ethyl 2-hydroxy propionate, and 1 to 20 weight% of γ-butyrolactone are contained with respect to total weight of the mixing solvent. The novolak resin is a cresol novolak resin obtained by condensing formaldehyde and the mixture of m-cresol and p-cresol. |
申请公布号 |
KR20110040084(A) |
申请公布日期 |
2011.04.20 |
申请号 |
KR20090097218 |
申请日期 |
2009.10.13 |
申请人 |
DONGWOO FINE-CHEM CO., LTD. |
发明人 |
CHANG, WON YOUNG;KIM, JONG HWAN;YOON, JONG HEUM;KIM, SEONG HYEON |
分类号 |
G03F7/039;G03F7/008 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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