发明名称 POSITIVE PHOTORESIST COMPOSITION
摘要 PURPOSE: A positive photo-resist composition is provided to improve operational environment and be used for a real industrial field by reducing the generation amount of bad odors. CONSTITUTION: A positive photo-resist composition includes a novolak resin, a diazide-based photosensitive compound, and a mixing solvent. 40 to 80 weight% of propylene glycol monomethyl ether acetate, 10 to 40 weight% of ethyl 2-hydroxy propionate, and 1 to 20 weight% of γ-butyrolactone are contained with respect to total weight of the mixing solvent. The novolak resin is a cresol novolak resin obtained by condensing formaldehyde and the mixture of m-cresol and p-cresol.
申请公布号 KR20110040084(A) 申请公布日期 2011.04.20
申请号 KR20090097218 申请日期 2009.10.13
申请人 DONGWOO FINE-CHEM CO., LTD. 发明人 CHANG, WON YOUNG;KIM, JONG HWAN;YOON, JONG HEUM;KIM, SEONG HYEON
分类号 G03F7/039;G03F7/008 主分类号 G03F7/039
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