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发明名称
SURFACE TREATMENT APPARATUS
摘要
申请公布号
KR20110040992(A)
申请公布日期
2011.04.20
申请号
KR20117007341
申请日期
2009.09.16
申请人
SEKISUI CHEMICAL CO., LTD.
发明人
UMEOKA TAKASHI;YAGISAWA HIROFUMI;MAYUMI SATOSHI
分类号
H01L21/3065;B08B5/00;H01L21/302
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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