发明名称 |
CYLINDRICAL MAGNETIC LEVITATION STAGE |
摘要 |
<p>The present invention provides a cylindrical magnetic levitation stage which includes a cylindrical substrate used to form micro-patterns of various arbitrary shapes on a large-area semiconductor substrate or display panel substrate, a cylindrical substrate, a combination of a first permanent magnet array and a first coil array and a combination of a first permanent magnet array and a first coil array, which are coupled to the cylindrical substrate, so that levitation, axial translation and rotation of the cylindrical substrate can be made finely through the control of a magnetic force generated by the interaction between a magnetic field generated by electric current applied to the coil arrays and a magnetic field generated from the permanent magnet arrays corresponding to the coil arrays.</p> |
申请公布号 |
EP2311081(A2) |
申请公布日期 |
2011.04.20 |
申请号 |
EP20080812225 |
申请日期 |
2008.09.29 |
申请人 |
KOREA ELECTRO TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
JEON, JEONG WOO;OH, HYUN SEOK;CHUNG, SUNG IL;LEE, DONG YEON;JEONG, YEON HO;KANG, DO HYUN;NIKIFOROV, S.A.;CARAIANI, MITICA |
分类号 |
H01L21/68;F16C32/04;G03F7/20;G03F7/24;H02K41/03 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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