发明名称 NITROGEN GAS INJECTION APPARATUS WITH REMOVAL FUNCTION OF STATIC ELECTRICITY
摘要 PURPOSE: A nitrogen gas injection apparatus with a removal function of static electricity is provided to prevent the accumulation of a by-production in a pipe line due to static electricity by neutralizing the static electricity inside the pipe line. CONSTITUTION: A connection pipe line(120) is connected to a pipe line transferring by-product gas in reaction. An injection nozzle(110) supplies nitrogen into the connection pipe line. A nitrogen supply line(161) is connected to the injection nozzle for supplying nitrogen. A gas generator(170) generates an ionized gas to neutralize the static electricity. A heater(130) heats the nitrogen gas applied to the injection nozzle.
申请公布号 KR20110040068(A) 申请公布日期 2011.04.20
申请号 KR20090097196 申请日期 2009.10.13
申请人 LEE, SEUNG YONG;CHO, YOUNG MAN 发明人 LEE, SEUNG YONG;CHO, YOUNG MAN
分类号 H01L21/02;H01L21/302 主分类号 H01L21/02
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