SILICON FIXTURES FOR SUPPORTING WAFERS DURING THERMAL PROCESSING AND METHOD OF FABRICATION,申请号EP20010950554-传众专利搜索

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发明名称	SILICON FIXTURES FOR SUPPORTING WAFERS DURING THERMAL PROCESSING AND METHOD OF FABRICATION
摘要
申请公布号	EP1297558(B1)	申请公布日期	2011.04.20
申请号	EP20010950554	申请日期	2001.06.26
申请人	INTEGRATED MATERIALS, INC.	发明人	BOYLE, JAMES, E.;DAVIS, ROBERT L.;DELANEY, LAURENCE, D.;ZEHAVI, RAANAN, Y.
分类号	H01L21/00;H01L21/673	主分类号	H01L21/00
代理机构		代理人
主权项
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