发明名称 Method and installation for producing a semiconductor device, and semiconductor device
摘要 <p>A method of producing a semiconductor device is provided, the semiconductor device 50 including a substrate 30, a semiconductor layer 36, 38, and at least one metallization layer 52, 70 adjacent to at least one element chosen from the substrate and the semiconductor layer, the method including forming at least one metallization layer which, adjacent to at least one element chosen from the substrate and the semiconductor layer, includes oxygen.</p>
申请公布号 EP2312633(A1) 申请公布日期 2011.04.20
申请号 EP20090173116 申请日期 2009.10.15
申请人 APPLIED MATERIALS, INC. 发明人 SCHEER, EVELYN;PIERALISI, FABIO;BENDER, MARCUS
分类号 H01L29/45;H01L21/336;H01L29/49 主分类号 H01L29/45
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