GRAPHENE GAS SENSOR UNIT AND COMPLEX, AND THE MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A graphene gas sensor unit, a complex thereof, and a manufacturing method thereof are provided to improve sensitivity even if the gas sensor unit is used for a long time. CONSTITUTION: A graphene gas sensor unit comprises a substrate(10), grapheme(20), and metal electrodes(30). A groove(11) is formed in the substrate and is composed of silicon or polydimethylsiloxane with an oxidized silicon film. A protective layer is formed on the substrate. The grapheme is hung on a part of the groove and forms a channel. The channel formation part of the grapheme is bent in a half-circle shape. The metal electrodes are formed in both ends of the groove of the substrate and are composed of gold.