METHOD FOR DETERMINING AN OVERALL LEAKAGE RATE OF A VACUUM SYSTEM AND VACUUM SYSTEM,申请号EP20090781528-传众专利搜索

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发明名称	METHOD FOR DETERMINING AN OVERALL LEAKAGE RATE OF A VACUUM SYSTEM AND VACUUM SYSTEM
摘要
申请公布号	EP2310823(A1)	申请公布日期	2011.04.20
申请号	EP20090781528	申请日期	2009.08.05
申请人	OERLIKON LEYBOLD VACUUM GMBH	发明人	PALTEN, THOMAS;WALTER, GERHARD WILHELM;EHRENSPERGER, DAMIAN
分类号	G01M3/20;G01M3/22	主分类号	G01M3/20
代理机构		代理人
主权项
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