发明名称 Mount for a scanning probe sensor package, scanning probe microscope and method of mounting or dismounting a scanning probe sensor package.
摘要 A mount for a scanning probe sensor package (27) comprises a support structure (1, 5) defining a plane within the mount and at least one movable snap joint element (9) designed for interacting with a respective counterpart (43) in a scanning probe sensor package (27). The snap joint element (9) is movable to a first position in which it exerts a force on a mounted scanning probe sensor package (27) so as to force said scanning probe sensor package (27) in a normal direction of said plane towards the support structure (1, 5) and to a second position in which it allows a scanning probe sensor package (27) to be mounted to or dismounted from the support structure (1, 5) along a normal direction of said plane. A scanning probe sensor package (27) comprises a sensor element (29) and a base (31) to which the sensor element (29) is fixed. The base comprises at least one snap joint section (43) which is designed to interact with a snap joint element (9) of the mount and has a dimension that is chosen such that it can pass the at least one snap joint element (9) along the normal direction of said plane defined within the mount when the snap joint element (9) is in its second position but can not pass the at least one snap joint element (9) along said normal direction when the snap joint element (9) is in its first position. Moreover, the base (31) has such a dimension that the snap joint element (9) can exert a force towards said plane defined within the mount in normal direction of the mount when the snap joint section (43) has passed the snap joint element towards said plane.
申请公布号 EP2312326(A1) 申请公布日期 2011.04.20
申请号 EP20090075467 申请日期 2009.10.16
申请人 SPECS SURFACE NANO ANALYSIS GMBH 发明人 RYCHEN, JOERG
分类号 G01Q70/02 主分类号 G01Q70/02
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