发明名称 A COMPOSITE GAS FLUID FLOW MEASURING METHOD AND ITS DEVICE
摘要 <p>A composite method for measuring gas fluid flow, comprising the steps of: (a) providing a bypass pipe astride to a mechanical device for measuring gas fluid flow with a temperature sensor and a pressure sensor, (b) providing an MEMS flowrate sensor on the bypass pipe, (c) connecting the temperature sensor, the pressure sensor, the mechanical device for measuring gas fluid flow and the MEMS flowrate sensor to a data processing system, and (d) linking the data processing system with a data display system, wherein the measured data from the temperature sensor, the pressure sensor, the mechanical device for measuring gas fluid flow and the MEMS flowrate sensor is processed by the data processing system and gas fluid flow data is displayed by the data display system.</p>
申请公布号 EP2312276(A1) 申请公布日期 2011.04.20
申请号 EP20080800638 申请日期 2008.09.24
申请人 MEMSIC SEMICONDUCTOR (WUXI) CO., LTD. 发明人 HAN, HUAICHENG;MAO, JULIN
分类号 G01F1/32;G01F1/46;G01F1/684;G01F7/00;G01F15/02 主分类号 G01F1/32
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