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发明名称
METHOD OF MAKING MULTIPLE IMPLANTATIONS IN A SUBSTRATE
摘要
申请公布号
EP2311083(A1)
申请公布日期
2011.04.20
申请号
EP20090804532
申请日期
2009.07.07
申请人
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES;COMMISSARIAT A L'ENERGIE ATOMIQUE C.E.A.
发明人
SIGNAMARCHEIX, THOMAS;DEGUET, CHRYSTEL;MAZEN, FREDERIC
分类号
H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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