| 摘要 |
<p>A dual-robot transfer system including: a transfer module for transferring work-pieces into and out of a process module; a physical interface between the transfer module and a supply-and-accept system; a first robot located substantially in the transfer module for transferring work-pieces to and from the process module and a buffer station located in the transfer module, the first robot including a first top arm and a first bottom arm, the first top arm and first bottom arm substantially having a first range of motion; and a second robot located substantially in the transfer module for transferring work-pieces to and from the process module, the buffer station, and the physical interface, the second robot including a second top arm and a second bottom arm, the second top arm and second bottom arm substantially having a second range of motion which overlaps in part with the first range of motion.</p> |
