发明名称 FILTER CLEANER
摘要 PURPOSE: A filter cleaner is provided to improve the elimination efficiency of contaminants by implementing a cleaning process using high pressure deionized water, isopropyl alcohol, potassium hydroxide. CONSTITUTION: A filter cleaner is composed of a filter cleaning unit(200), a deionized water supplying unit(100), an isopropyl alcohol supplying unit(160), an air supplying unit(130), and a draining unit(300). The filter cleaning unit is composed of filter chucking part, an air spraying part(260), and a case part(240). The deionized water supplying part is in connection with the first fixing jig of the filter cleaning unit. The isopropyl alcohol supplying unit is in connection with the first fixing jig of the filter cleaning unit. The air supplying unit is in connection with the first fixing jig of the filter cleaning unit and the air spraying unit. The draining unit naturally drains a cleaning agent.
申请公布号 KR20110040447(A) 申请公布日期 2011.04.20
申请号 KR20090097714 申请日期 2009.10.14
申请人 KIM, SUK HYUN 发明人 KIM, SUK HYUN
分类号 B01D35/00;B01D35/16;H01L21/08 主分类号 B01D35/00
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