CORNER CUBE RETROREFLECTOR AND METHOD FOR FABRICATING THE SAME

摘要

PURPOSE: A corner-tube-type retro-reflector and a manufacturing method thereof are provided to enhance flatness. CONSTITUTION: A rectangular cavity area is formed on the central area of a substrate(210). Four rectangular movable reflecting mirrors(220) are located on the cavity area in a state of being separated by a cross shape member. One movable piezoelectric cantilever(230) connects the corner of the cavity area to a first corner of the movable reflecting mirror adjacent to the cavity corner. Other fixed piezoelectric cantilever(240) connects second and third corners of the movable reflecting mirror to the adjacent part of the substrate. A fixed reflecting mirror(250) is formed on a cross shape member perpendicularly to one surface of the substrate.