发明名称 ULTRAVIOLET LIGHT RECEIVING ELEMENT AND METHOD FOR MEASURING AMOUNT OF ULTRAVIOLET LIGHT
摘要 [Problems to be Solved] To provide a novel ultraviolet light receiving element which is selectively sensitive to ultraviolet radiation, and a method for measuring the dose of ultraviolet radiation using the ultraviolet light receiving element. [Means to Solve the Problems] An ultraviolet detecting layer composed of a thin film of a metal fluoride, such as cerium fluoride, lithium fluoride, magnesium fluoride or calcium fluoride, is formed on a substrate of silica glass, sapphire or the like. Further, at least a pair of an anode and a cathode are formed on the ultraviolet detecting layer to prepare an ultraviolet light receiving element. This ultraviolet light receiving element changes in electric resistivity in accordance with the dose of incident ultraviolet radiation. Thus, the dose of ultraviolet radiation can be measured by taking out and measuring the change as an electric signal.
申请公布号 EP2312644(A1) 申请公布日期 2011.04.20
申请号 EP20090802990 申请日期 2009.07.29
申请人 NATIONAL UNIVERSITY CORPORATION NAGOYA INSTITUTE OF TECHNOLOGY;TOKUYAMA CORPORATION 发明人 ONO, SHINGO;KAWAGUCHI, NORIAKI;FUKUDA, KENTARO;SUYAMA, TOSHIHISA
分类号 H01L31/09;G01J1/02;G01J1/42;H01L31/0264;H01L31/032 主分类号 H01L31/09
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