发明名称 Beam conditioning to reduce spatial coherence
摘要 Methods and apparatus relating to electromagnetic beam (e.g., laser beam) conditioning are described. In an embodiment, electromagnetic beam conditioning may be performed utilizing reflectors to temporally differentiate electromagnetic beam subsections and sub-beams resulting in reduced spatial coherence of the beam. Other embodiments are also described.
申请公布号 US7926959(B1) 申请公布日期 2011.04.19
申请号 US20080060050 申请日期 2008.03.31
申请人 KLA-TENCOR CORPORATION 发明人 KVAMME DAMON;ALLES DAVID;LEE CHUN;JIANG WU
分类号 G02B5/122 主分类号 G02B5/122
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