发明名称 Vertical transistor and vertical transistor array
摘要 A vertical transistor including a substrate, a gate, a base line and a gate dielectric layer is provided. The substrate includes a pillar protruding out of a surface of the substrate. The pillar includes a first doped region, a channel region and a second doped region from bottom to top. The gate is disposed on a sidewall at one side of the channel region. The base line is disposed on a sidewall at the other side of the channel region and not contacted with the gate. The gate dielectric layer is disposed between the gate and the channel region.
申请公布号 US7928490(B2) 申请公布日期 2011.04.19
申请号 US20090368278 申请日期 2009.02.09
申请人 NANYA TECHNOLOGY CORPORATION 发明人 CHEN JUNG-HUA
分类号 H01L27/108;H01L29/76;H01L29/94;H01L31/119 主分类号 H01L27/108
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