发明名称 Phase plate, imaging method, and electron microscope
摘要 The invention concerns a phase plate for electron optical imaging, wherein the zero beam (4) is phase-shifted in order to obtain an image with optimum contrast through interference with the diffracted electron beams (5, 5′). The shading of diffracted electron beams (5, 5′) is kept to a minimum and shading that cannot be reconstructed from the obtained image data is prevented. This is achieved in that the electrode (1′) is designed as a shielded conductor (7), which is disposed to extend from a mounting (8) in a substantially radial direction towards the area of the zero beam (4), wherein the shielded conductor (7) has an end (9) in front of the area of the zero beam (4) such that a field (6) is formed between the conductor (7) and the shielding (10) surrounding it, which overlaps this area. The invention also concerns an imaging method for complete reconstruction of the image and an electron microscope (12) which is provided with the phase plate (1).
申请公布号 US7928379(B2) 申请公布日期 2011.04.19
申请号 US20070224667 申请日期 2007.10.26
申请人 CEOS CORRECTED ELECTRON OPTICAL SYSTEMS GMBH 发明人 ZACH JOACHIM
分类号 H01J37/26 主分类号 H01J37/26
代理机构 代理人
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