发明名称 Reinforced composite stamp for dry transfer printing of semiconductor elements
摘要 Provided are reinforced composite stamps, devices and methods of making the reinforced composite stamps disclosed herein. Reinforced composite stamps of certain aspects of the present invention have a composition and architecture optimized for use in printing systems for dry transfer printing of semiconductor structures, and impart excellent control over relative spatial placement accuracy of the semiconductor structures being transferred. In some embodiments, for example, reinforced composite stamps of the present invention allow for precise and repeatable vertical motion of the patterned surface of the printing apparatus with self-leveling of the stamp to the surface of a contacted substrate. Reinforced composite stamps of certain aspect of the present invention achieve a uniform distribution of contact forces between the printing apparatus patterned surface and the top surface of a substrate being contacted by the reinforced composite stamp of the printing apparatus.
申请公布号 US7927976(B2) 申请公布日期 2011.04.19
申请号 US20080177963 申请日期 2008.07.23
申请人 SEMPRIUS, INC. 发明人 MENARD ETIENNE
分类号 H01L21/00;B29C33/40;B29C39/22;B29C65/70;B41L47/04 主分类号 H01L21/00
代理机构 代理人
主权项
地址