Pulse generating device for plasma doping apparatus,申请号KR20090040948-传众专利搜索

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发明名称	Pulse generating device for plasma doping apparatus
摘要
申请公布号	KR101029780(B1)	申请公布日期	2011.04.19
申请号	KR20090040948	申请日期	2009.05.11
申请人		发明人
分类号	H01L21/265;H01J37/30	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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