SUBSTRATE BRUSH SCRUBBING AND PROXIMITY CLEANING-DRYING SEQUENCE USING COMPATIBLE CHEMISTRIES, AND PROXIMITY SUBSTRATE PREPARATION SEQUENCE, AND METHODS, APPARATUS, AND SYSTEMS FOR IMPLEMENTING THE SAME

摘要

A METHOD FOR CLEANING AND DRIYING A FRONT AND A BACK SURFACE OFA SUBSTRATE ( 102) IS PROVIDED. THE METHOD INCLUDES BRUSH SCRUBBING THE BACK SURFACE ( 102B) OF THE SUBSTRATE ( 102) USING A BRUSH SCRUBBING FLUID CHEMISTRY (121). THE METHOD FURTHER INCLUDES APPLYING A FRONT MENISCUS (150) ONTO THE FRONT SURFACE ( 102A) OF THE SUBSTRATE ( 102) UPON COMPLETING THE BRUSH SCRUBBING OF THE BACK SURFACE (102B). THE FRONT MENISCUS (150) INCLUDES A FRONT CLEANING CHEMISTRY THAT IS CHEMICALLY COMPATIBLE WITH THE BRUSH SCRUBBING FLUID CHEMISTRY (121). A METHOD FOR PREPARING A SURFACE OF A SUBSTRATE (102) IS ALSO PROVIDED. THE METHOD INCLUDES SCANNING THE SURFACE OF THE SUBSTRATE BY A MENISCUS ( 150). PREPARING THE SURFACE OF THE SUBSTRATE USING THE MENISCUS (150) (1102). AND PERFORMING A NEXT PREPARATION OPERATION ON THE SURFACE OF THE SUBSTRATE (102) THAT WAS PREPARED WITHOUT PERFORMING A RINSING OPERATION ( 1104).