发明名称 TWO-FLUID INJECTION NOZZLE
摘要 PURPOSE: A two-fluid injection nozzle is provided to minutely adjust the size of particle of the liquid by generating primary and secondary collisions between the liquid and the gas. CONSTITUTION: A first inlet(311) through which the first fluid is introduced is formed on one end of a nozzle(300). A first spraying hole(322) sprays the first liquid which flows through the path formed along the central axis of the nozzle. A second inlet hole(314) through which the second fluid is introduced is formed on the side of the nozzle.
申请公布号 KR20110039040(A) 申请公布日期 2011.04.15
申请号 KR20090096304 申请日期 2009.10.09
申请人 SEMES CO., LTD. 发明人 SONG, GIL HUN;KIM, TAE HO;LEE, JU DONG
分类号 H01L21/302;H01L21/306 主分类号 H01L21/302
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