发明名称 |
TWO-FLUID INJECTION NOZZLE |
摘要 |
PURPOSE: A two-fluid injection nozzle is provided to minutely adjust the size of particle of the liquid by generating primary and secondary collisions between the liquid and the gas. CONSTITUTION: A first inlet(311) through which the first fluid is introduced is formed on one end of a nozzle(300). A first spraying hole(322) sprays the first liquid which flows through the path formed along the central axis of the nozzle. A second inlet hole(314) through which the second fluid is introduced is formed on the side of the nozzle.
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申请公布号 |
KR20110039040(A) |
申请公布日期 |
2011.04.15 |
申请号 |
KR20090096304 |
申请日期 |
2009.10.09 |
申请人 |
SEMES CO., LTD. |
发明人 |
SONG, GIL HUN;KIM, TAE HO;LEE, JU DONG |
分类号 |
H01L21/302;H01L21/306 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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