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发明名称
QUELLENBEHÄLTER EINES VPE-REAKTORS
摘要
申请公布号
AT503044(T)
申请公布日期
2011.04.15
申请号
AT20070728836T
申请日期
2007.05.07
申请人
AIXTRON SE
发明人
FRANKEN, WALTER;KAEPPELER, JOHANNES
分类号
C30B25/14;C23C16/458
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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