发明名称 METHOD OF MANUFACTURING A STAMP FOR IMPRINTING
摘要 PURPOSE: A manufacturing method of an imprinting stamp is provided to regularly maintain the flatness of a stamp since the surface of an outer glass plate is not etched by a protective layer. CONSTITUTION: A manufacturing method of an imprinting stamp is as follows. A glass plate(100) and HF(Hydrogen Fluoride) react and an HF blocking layer(110) is formed on the top of the glass plate so that the glass plate dies not corrode. A pattern layer(120) is formed on the top of the HF blocking layer. The exposed HF blocking layer is removed. The exposed glass plate is etched using HF. A remaining pattern layer and the HF blocking layer are removed.
申请公布号 KR20110038997(A) 申请公布日期 2011.04.15
申请号 KR20090096243 申请日期 2009.10.09
申请人 LIGADP CO., LTD. 发明人 CHOI, JUNG SU;PARK, SANG IL;LIM, YONG JIN
分类号 B29C33/38;G03F7/00 主分类号 B29C33/38
代理机构 代理人
主权项
地址