THE SEED AND SEED CHUCK FOR BEING PROTECTED AGAINST FRACTURE

摘要

PURPOSE: A silicon seed crystal and a seed crystal chuck are provided to prevent the damage of the seed crystal due to the minute crack by preventing the local concentration of the stress on the notch part of the seed crystal. CONSTITUTION: A seed crystal(21) is manufactured in inverse trapezoid shape. A seed crystal holder(23) accepts the seed crystal. The seed crystal is combined with a seed crystal chuck(22) after being accepted in the seed crystal holder. The seed crystal and the seed crystal chuck are combined by the thickness difference of the seed crystal.