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发明名称
KONDENSATORKONSTRUKTIONEN, RAUHE SILIZIUMHALTIGE OBERFLÄCHEN UND VERFAHREN ZUR HERSTELLUNG VON RAUHEN SILIZIUMHALTIGEN OBERFLÄCHEN
摘要
申请公布号
AT503267(T)
申请公布日期
2011.04.15
申请号
AT20040782390T
申请日期
2004.08.26
申请人
MICRON TECHNOLOGY, INC.
发明人
BLALOCK, GUY;BREINER, LYLE;PING, ER-XUAN;CHEN, SHENLIN
分类号
H01L21/02;H01L21/8242
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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