COIL AS CELL FOR GAAS SINGLE CRYSTAL GROWTH

摘要

PURPOSE: An arsenic raw material charging apparatus for the gallium arsenide single crystal is provided to minimize the decrease of production and impurity content by charging the gallium and the arsenic in the respective elemental form. CONSTITUTION: A body portion(101) accepts the arsenic raw material. An arsenic raw material charging hole is connected to the main body to discharge the gallium gas. A gas ventilation waste paper apparatus(102) prevents the pressure of the main body from falling. A quartz damper(103) prevents arsenic raw material from being discharged to the bottom when installing on the seed pull shaft.