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发明名称
VORRICHTUNG ZUR HERSTELLUNG UND PRÄSENTATION VON FLÜSSIGKEITSSCHICHTEN
摘要
申请公布号
AT505812(T)
申请公布日期
2011.04.15
申请号
AT20080104357T
申请日期
2008.06.11
申请人
SIEMENS ELECTRONICS ASSEMBLY SYSTEMS GMBH & CO. KG
发明人
DASCHNER, CHRISTIAN;ZEIGER, THOMAS
分类号
H01L21/00;B23K1/20;B23K3/06;B23K3/08
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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