| 摘要 |
PURPOSE: A soundproof chamber for a nano measuring device with a muffler-integrated fan filter unit is provided to maintain a proper environment for nano-scale measurement in a nano measurement space by reducing the noise and vibration transmitted to the nano measurement space. CONSTITUTION: A soundproof chamber for a nano measuring device comprises a body cabinet, a table(40), and a fan filter unit. The body cabinet comprises a measuring device receiving part and a door and is divided into a nano measurement space(S1) and a fan filter unit installation space. A nano measuring device is loaded on the table. The fan filter unit is installed inside the fan filter unit installation space to supply the air to the nano measurement space and return the air from the nano measurement space to the fan filter unit installation space. The fan filter unit comprises an upper plate(51) with an air intake(51a), a wall(52), a bottom plate(53) with an opening, an air intake fan(58), a vibration reducing unit, and a filter member(59).
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