发明名称 CHILLER TANK FOR SEMICONDUCTOR
摘要 PURPOSE: A tank for a semiconductor chiller is provided to improve productivity by welding a protrusion unit of a separator which is inserted to each hole of a container. CONSTITUTION: A separator(200) separates a cooling part from a heating part in the inner space of a tank for a semiconductor chiller. The separator includes a first separator(210) and a second separator(220). The first separator and the second separator include an upper protrusion unit(212,222) and a lower protrusion unit(214,224). The upper protrusion unit is combined with one side of a cover(300) by forming a step through an upper groove. A lower protrusion unit is combined with one side of a body(100) by forming a step though a lower groove.
申请公布号 KR101029595(B1) 申请公布日期 2011.04.15
申请号 KR20100070364 申请日期 2010.07.21
申请人 HA, JUNG WAN 发明人 HA, JUNG WAN
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址