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发明名称
BELEUCHTUNGSSYSTEM FÜR DIE MIKROLITHOGRAPHIE
摘要
申请公布号
AT502323(T)
申请公布日期
2011.04.15
申请号
AT20040726980T
申请日期
2004.04.13
申请人
CARL ZEISS SMT GMBH
发明人
SINGER, WOLFGANG;WIETZORREK, JOACHIM;HAINZ, JOACHIM;WEIRAUCH, GABRIELE;MAUL, MANFRED
分类号
G03F7/20;G02B17/06;G21K1/06
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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