| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus which controls the rolling of a movable coating unit due to the influence of piping. SOLUTION: The coating apparatus for applying a coating liquid on the substrate is provided with a substrate retention part, a guide part 40 extending in the main scanning direction that is approximately parallel to the substrate, a slider 52 supported by the guide part 40 so as to be movable in the main scanning direction with an air layer interposed within the guide part 40, a movable coating unit 50 having a discharge part 60 supported by the slider 52 and piping members 80, 81 to introduce a fluid to the movable coating unit 50. The piping members 80, 81 are divided to both sides to be fixed across the axis of the guide part 40 to the movable coating unit 50. COPYRIGHT: (C)2011,JPO&INPIT
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