| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that, in case two pairs of electrodes are provided for generating a plenty of ions, an area occupied by the electrodes becomes two times when two pairs of electrodes are arranged side by side on the same surface on a substrate to resultantly cause a problem of large-sizing of the substrate and a casing for accommodating the substrate has to be large-sized, and freedom in selecting the accommodating space of the ion generator has to be narrowed. SOLUTION: The ion generator is provided with needle-shaped electrodes arranged upright on both faces of a substrate, and a plate-shaped electrode arranged for each of the needle-shaped electrode, wherein the respective needle-shaped electrodes are connected each other and the respective plate-shaped electrodes are connected each other. COPYRIGHT: (C)2011,JPO&INPIT
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