| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of measuring a dielectric constant of SNDM and SNDM capable of avoiding change of probe edge shape by detecting to bring a probe edge into contact with a sample in dielectric constant measurement of a minute region. SOLUTION: The method of measuring the dielectric constant enables the measurement of an electrostatic capacity while working excitation due to prescribed amplitude in two kinds of frequencies directing a probe 1 or the measuring sample 2 in a Z direction, and that of a differential value (differential capacity) and a second order differential value (second order differential capacity) of the electrostatic capacity by differing in the excitation amplitude. The method enables detection to bring the probe into contact with the sample by measuring distance dependency of the second order differential capacity. In addition, the method enables the measurement of an electrostatic capacity of a moment when the probe is brought into contact with the sample. In addition, the method obtains the dielectric constant of an optional minute region of a dielectric constant unknown sample by using a theoretic curve of a relative dielectric constant based on a video charge method and the electrostatic capacity and obtaining a calibration curve due to a dielectric constant known sample. COPYRIGHT: (C)2011,JPO&INPIT
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