| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for inspecting surface irregularities of a resist film easily or in real time, and to provide a DTM manufacturing line. SOLUTION: The surface of a resist film applied to the surface of a surface disk is irradiated with inspection light, regular reflection light is detected from the surface of the resist film and its two-dimensional images is output. The output displays results of the two-dimensional detection as gray scale images or hue images according to its detection level in addition to the characteristics. COPYRIGHT: (C)2011,JPO&INPIT |
