| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device for accurately inspecting a surface flaw, using a simple constitution. SOLUTION: The surface inspection device is equipped with a planar illuminator 2 for irradiating the processed surface Wf to be inspected of an inspection target W with a diffused light; the camera 3, which photographs the surface Wf to be inspected, installed at a position not receiving the light regularly reflected from the flat surface of the surface Wf to be inspected of the light emitted from the illuminator 2; an image acquiring section for acquiring the image photographed by the camera 3; and a flaw determining section for determining the presence of the flaw of the inspection target, on the basis of the image. COPYRIGHT: (C)2011,JPO&INPIT |
