| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a system for processing a substrate capable of preventing the deterioration of a productivity by lot charges corresponding to statuses. <P>SOLUTION: A buffer 5 in front of a device receives an FOUP from a conveyor system 7 by the indication of a host computer 3. The buffer 5 in front of the device obtains either of "an optimal device" representing which of substrate processors 1 (1A to 1C) is optimal for processing the received FOUP and "an optimal order device" representing which of substrate processors 1 (1A to 1C) is optimal used for processing and the order of a plurality of FOUPs to be processed or both "the optimal device" and "the optical order device" to each substrate processor 1 (1A to 1C) first. Since the buffer 5 in front of the device indicates the conveyance of the FOUP to the conveyor system on the basis of the result, the states of the substrate processors 1 (1A to 1C) can be considered, thus improving the productivity. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
