| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear actuator removing foreign matter even if the foreign matter enters a portion between a fixed part and a slide table, and thereby to prevent adherence of the foreign matter to a guide rail. SOLUTION: In the linear actuator 11, the fixed part is formed of a cylinder tube 12, and the guide rail 30 installed to an upper surface S of the cylinder tube 12. A guide block 40 is slidably supported to the guide rail 30, and the slide table 50 is fixed to the guide block 40. In the upper surface S of the cylinder tube 12, a first purge hole 121, a second purge hole, and a third purge hole are formed at positions opposed to the slide table 50. In an opposed face 50a of the slide table 50 with respect to the upper surface S, a passage formation wall 51 is provided to form an air passage 52 disposed between the slide table 50 and the fixed part at a fixed clearance and extended in an axial direction and a width direction of the cylinder tube 12. COPYRIGHT: (C)2011,JPO&INPIT
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