| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment apparatus which can be utilized with less preparation time. SOLUTION: The treatment apparatus, supplied with a treatment liquid W from a liquid storage tank 11 to a discharge head unit 110 to treat the surface of an object to be treated 50 with the treatment liquid W discharged from the discharge head unit 110, is constituted so as to have a bubble generating mechanism 13, 15 generating fine bubbles in the treatment liquid W up to the time when the treatment liquid W from the liquid storage tank 11 is discharged from the discharge head unit 110. COPYRIGHT: (C)2011,JPO&INPIT
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