| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying method capable of preventing damage of a substrate. SOLUTION: An object 5 to be conveyed is supported by a conveying part. Each of a first part 64a and a second part 64b of a chuck 6 presses a first region forming a part of an opposite side S2 on one side S1 of the object 5 to be conveyed and a second region forming a part of a main surface MS to hold the object 5 to be conveyed. The second region is away from an edge of the main surface MS by a space AP2. By moving both of the conveying part and the chuck 6, the object 5 to be conveyed which is supported by the conveying part and is held by the chuck 6 is moved. COPYRIGHT: (C)2011,JPO&INPIT |
