发明名称 |
Vibration control apparatus, vibration control method, exposure apparatus, and device manufacturing method |
摘要 |
A vibration control apparatus suppresses a vibration of a structure which is vibrated. The vibration control apparatus includes: a vibration isolation apparatus that supports the structure and suppresses a transmission of a vibration to the structure, the vibration having an amplitude equal to or less than a first amplitude in a predetermined direction; and a damping apparatus that damps a vibration of the structure vibrating in the predetermined vibration direction with a second amplitude larger than the first amplitude, to thereby reduce the vibration to equal to or less than the first amplitude.
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申请公布号 |
US2011085152(A1) |
申请公布日期 |
2011.04.14 |
申请号 |
US20100775022 |
申请日期 |
2010.05.06 |
申请人 |
NISHINO HIDEAKI;SHIRASU HIROSHI |
发明人 |
NISHINO HIDEAKI;SHIRASU HIROSHI |
分类号 |
G03B27/58;F16F7/00;G03F7/20 |
主分类号 |
G03B27/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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