MAGNETIC TUNNEL JUNCTION DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要
PURPOSE: A magnetic tunnel junction device and a method for manufacturing the same are provided to prevent the diffusion of an element for deteriorating the operation property of a magnetic tunnel junction by processing a magnetic junction device with an in-situ in deposition. CONSTITUTION: A first magnetic layer(10) has a magnetization direction which can be reversed. A nonmagnetic layer(20) is located on the first magnetic layer. A second magnetic layer(30) is located on the nonmagnetic layer. A second magnetic layer has a fixed magnetization direction. An oxidation prevention layer(40) is located on the second magnetic layer. A third magnetic layer(50) is located on the oxidation prevention layer. The third magnetic layer holds the magnetization direction of the second magnetic layer. An anti- ferroelectric material layer(60) holds the magnetization direction of the third magnetic layer.