| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing patterned media such as discrete track media to be used for a high-density hard disk drive, which removes a resist mask layer without deteriorating surface flatness due to a remaining resist mask. SOLUTION: The patterned media include magnetic recording layers wherein recording areas and non-recording areas are regularly arranged in an in-plane direction of a substrate. The method of manufacturing the patterned media has a process of removing a resist mask layer including SOG by using the alkaline solvent, wherein an end of removing the resist mask layer is determined based on a film thickness of a recess of the resist mask layer in which solubility to an alkaline-based system solvent is reduced compared with that in a projection part due to ion irradiation. COPYRIGHT: (C)2011,JPO&INPIT |
