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发明名称
INSPECTION METHOD AND APPARATUS.
摘要
申请公布号
NL2005332(A)
申请公布日期
2011.04.14
申请号
NL20102005332
申请日期
2010.09.08
申请人
ASML NETHERLANDS B.V.
发明人
VERSTAPPEN, LEONARDUS;BOEF, ARIE
分类号
G01N21/47;G03F7/20
主分类号
G01N21/47
代理机构
代理人
主权项
地址
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