| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate for a liquid discharge head with a good yield, in which an insulating film for insulating a penetrating electrode and other members is formed with good accuracy, and which provides a good electric property. SOLUTION: The manufacturing method of the substrate for the liquid discharge head consists of (1) a step for preparing a base material 2 having, on a first surface side, an element 1 for generating an energy to be used for discharging a liquid and an electrode layer 11 electrically connected with the element, (2) a step for forming a concave part 5 having a bottom surface being a part of the electrode layer, on a second surface which is a back surface of a first surface of the base material, (3) a step for coating an inner side surface and the bottom surface of the concave part with the insulating film 21, (4) a step for removing a part of the insulating film coating the bottom surface by a laser beam 22 to expose the electrode layer partially, and (5) a step for forming the penetrating electrode penetrating between the first surface and the second surface of the substrate so as to electrically connect with an exposed part of the electrode layer. COPYRIGHT: (C)2011,JPO&INPIT |
