| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum lamination device that can excellently laminate thin resin films without causing wrinkles on the resin film, when laminating the thin resin films on both surfaces of a substrate, and a lamination method. SOLUTION: The vacuum lamination device configured to laminate the resin films F on both the surfaces of the substrate S by mounting the substrate S having the resin films F temporarily attached to upper and lower surfaces on the upper surface of a pedestal 5 provided in a vacuum chamber and inflating and pressing a diaphragm 6 to the substrate S is characterized in that the upper surface of the pedestal 5 is a protrusion surface which is tall at a center part and short at an outer peripheral part. Further, in the lamination method for laminating the resin films F on both the surfaces of the substrate S by mounting the substrate having the resin films F temporarily attached to the upper and lower surfaces on the upper surface of the pedestal 5 provided in the vacuum chamber and inflating and pressing a diaphragm 6 to the substrate S, the upper surface of the pedestal 5 is the protrusion surface which is tall at the center part and short at the outer peripheral part. COPYRIGHT: (C)2011,JPO&INPIT |
