| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric vibrating piece having reduced other axis sensitivity, a piezoelectric vibrator in which the piezoelectric vibrating piece is mounted, and an acceleration sensor. SOLUTION: A piezoelectric vibrating piece includes: a cantilevered vibrating arm 14 that extends in a first direction; a base section 12 that supports the vibrating arm in a cantilevered manner; a first side surface electrode film 36 that bends and vibrates the vibrating arm 14 in a second direction perpendicular to the first direction; a second side surface electrode film 38; a first inner surface electrode film 40; a second inner surface electrode film 42; a bottom surface electrode film 44; a first excitation electrode film 46; a second excitation electrode film 48; a third excitation electrode film 50; an extraction electrode film 52; and a connection electrode film 54. In the piezoelectric vibrating piece, the vibrating arm 14 includes a rigidity adjusting section for adjusting bending in a third direction perpendicular to the first and second directions. The adjusting section is a groove 26 provided along the direction of a free end of the vibrating arm 14, from a base section side of a surface facing the third direction of the vibrating arm 14. COPYRIGHT: (C)2011,JPO&INPIT
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