发明名称 |
Rundschleifvorrichtung und Verfahren zum Schleifen |
摘要 |
<p>A cylindrical grinding apparatus grinding a side face of a cylindrical ingot, having a centering means of at least three rollers and an arm holding the rollers. The cylindrical ingot is placed on a table longitudinally, its end faces being held vertically with a pair of clamps. Afterward, the centering means moves backward and forward against the ingot horizontally to bring the rollers into pressure contact with the side face of the ingot while the ingot is rotated about a central axis with a rotation means, and thereafter the ingot is ground with the grinding wheel. The cylindrical grinding apparatus and the method for grinding enable improvement of grinding processing efficiency of the ingot.</p> |
申请公布号 |
DE112009000187(T5) |
申请公布日期 |
2011.04.14 |
申请号 |
DE20091100187T |
申请日期 |
2009.01.21 |
申请人 |
SHIN-ETSU HANDOTAI CO. LTD. |
发明人 |
NISHINO, HIDEHIKO;HIRANO, YOSHIHIRO |
分类号 |
B24B41/06;B24B5/04;B28D5/02;H01L21/304 |
主分类号 |
B24B41/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|